Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730175 | Ceramic substrate support | Joseph Yudovsky, Salvador P. Umotoy, Shamouil Shamouilian, Rita Dukes, Xiaoxiong Yuan | 2004-05-04 |
| 6494955 | Ceramic substrate support | Lawrence Chung-Lai Lei, Sal Umotoy, Xiaoxiong Yuan, Anzhong Chang, Hongbee Teoh +1 more | 2002-12-17 |
| 5332443 | Lift fingers for substrate processing apparatus | Sandy M. Chew, Shane D. Clark, Dale R. DuBois, Cissy Leung, Alan F. Morrison +1 more | 1994-07-26 |