Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699530 | Method for constructing a film on a semiconductor wafer | Michal Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao +1 more | 2004-03-02 |
| 6270621 | Etch chamber | Simon W. Tam, Semyon Sherstinsky, Mei Chang, Ashok Sinha | 2001-08-07 |
| 6155198 | Apparatus for constructing an oxidized film on a semiconductor wafer | Michael Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao +1 more | 2000-12-05 |
| 6123864 | Etch chamber | Simon W. Tam, Semyon Sherstinsky, Mei Chang, Ashok Sinha | 2000-09-26 |
| 6103014 | Chemical vapor deposition chamber | Lawrence Chung-Lai Lei, Ilya Perlov, Karl A. Littau, Mei Chang, Ashok Sinha | 2000-08-15 |
| 5935338 | Chemical vapor deposition chamber | Lawrence Chung-Lai Lei, Ilya Perlov, Karl A. Littau, Mei Chang, Ashok Sinha | 1999-08-10 |
| 5888304 | Heater with shadow ring and purge above wafer surface | Salvador P. Umotoy, Karl A. Littau, Richard A. Marsh, Lawrence Chung-Lai Lei, Dale R. DuBois | 1999-03-30 |
| 5882419 | Chemical vapor deposition chamber | Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei | 1999-03-16 |
| 5856240 | Chemical vapor deposition of a thin film onto a substrate | Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei | 1999-01-05 |
| 5855687 | Substrate support shield in wafer processing reactors | Dale R. DuBois, Richard A. Marsh, Mei Chang | 1999-01-05 |
| 5766365 | Removable ring for controlling edge deposition in substrate processing apparatus | Salvador P. Umotoy, Karl A. Littau, Richard A. Marsh, Lawrence Chung-Lai Lei | 1998-06-16 |
| 5695568 | Chemical vapor deposition chamber | Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei | 1997-12-09 |
| 5688331 | Resistance heated stem mounted aluminum susceptor assembly | Michio Aruga, Atsunobu Ohkura, Akihiko Saito, Kenji Suzuki, Kenichi Taguchi +1 more | 1997-11-18 |
| 5516367 | Chemical vapor deposition chamber with a purge guide | Lawrence Chung-Lai Lei, Ilya Perlov, Karl A. Littau, Mei Chang, Ashok Sinha | 1996-05-14 |
| 5421401 | Compound clamp ring for semiconductor wafers | Semyon Sherstinsky, Mei Chang, Charles C. Harris, Virendra V. Rana, James Roberts +2 more | 1995-06-06 |
| 5332443 | Lift fingers for substrate processing apparatus | Sandy M. Chew, Shane D. Clark, Ron Rose, Dale R. DuBois, Cissy Leung +1 more | 1994-07-26 |