| 6699530 |
Method for constructing a film on a semiconductor wafer |
Michal Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao +1 more |
2004-03-02 |
| 6270621 |
Etch chamber |
Simon W. Tam, Semyon Sherstinsky, Mei Chang, Ashok Sinha |
2001-08-07 |
| 6155198 |
Apparatus for constructing an oxidized film on a semiconductor wafer |
Michael Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao +1 more |
2000-12-05 |
| 6123864 |
Etch chamber |
Simon W. Tam, Semyon Sherstinsky, Mei Chang, Ashok Sinha |
2000-09-26 |
| 6103014 |
Chemical vapor deposition chamber |
Lawrence Chung-Lai Lei, Ilya Perlov, Karl A. Littau, Mei Chang, Ashok Sinha |
2000-08-15 |
| 5935338 |
Chemical vapor deposition chamber |
Lawrence Chung-Lai Lei, Ilya Perlov, Karl A. Littau, Mei Chang, Ashok Sinha |
1999-08-10 |
| 5888304 |
Heater with shadow ring and purge above wafer surface |
Salvador P. Umotoy, Karl A. Littau, Richard A. Marsh, Lawrence Chung-Lai Lei, Dale R. DuBois |
1999-03-30 |
| 5882419 |
Chemical vapor deposition chamber |
Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei |
1999-03-16 |
| 5856240 |
Chemical vapor deposition of a thin film onto a substrate |
Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei |
1999-01-05 |
| 5855687 |
Substrate support shield in wafer processing reactors |
Dale R. DuBois, Richard A. Marsh, Mei Chang |
1999-01-05 |
| 5766365 |
Removable ring for controlling edge deposition in substrate processing apparatus |
Salvador P. Umotoy, Karl A. Littau, Richard A. Marsh, Lawrence Chung-Lai Lei |
1998-06-16 |
| 5695568 |
Chemical vapor deposition chamber |
Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei |
1997-12-09 |
| 5688331 |
Resistance heated stem mounted aluminum susceptor assembly |
Michio Aruga, Atsunobu Ohkura, Akihiko Saito, Kenji Suzuki, Kenichi Taguchi +1 more |
1997-11-18 |
| 5516367 |
Chemical vapor deposition chamber with a purge guide |
Lawrence Chung-Lai Lei, Ilya Perlov, Karl A. Littau, Mei Chang, Ashok Sinha |
1996-05-14 |
| 5421401 |
Compound clamp ring for semiconductor wafers |
Semyon Sherstinsky, Mei Chang, Charles C. Harris, Virendra V. Rana, James Roberts +2 more |
1995-06-06 |
| 5332443 |
Lift fingers for substrate processing apparatus |
Sandy M. Chew, Shane D. Clark, Ron Rose, Dale R. DuBois, Cissy Leung +1 more |
1994-07-26 |
