| 7829243 |
Method for plasma etching a chromium layer suitable for photomask fabrication |
Xiaoyi Chen, Michael N. Grimbergen, Madhavi R. Chandrachood, Jeffrey X. Tran, Ajay Kumar +1 more |
2010-11-09 |
| 6270621 |
Etch chamber |
Semyon Sherstinsky, Mei Chang, Alan F. Morrison, Ashok Sinha |
2001-08-07 |
| 6123864 |
Etch chamber |
Semyon Sherstinsky, Mei Chang, Alan F. Morrison, Ashok Sinha |
2000-09-26 |
| 5883778 |
Electrostatic chuck with fluid flow regulator |
Semyon Sherstinsky, John F. Cameron, Shamouil Shamouilian, Manoocher Birang, Alfred Mak +1 more |
1999-03-16 |
| 5671117 |
Electrostatic chuck |
Semyon Sherstinsky, Shamouil Shamouilian, Manoocher Birang, Alfred Mak |
1997-09-23 |
| 5634266 |
Method of making a dielectric chuck |
Semyon Sherstinsky, Shamouil Shamouilian, Manoocher Birang, Alfred Mak |
1997-06-03 |
| 5421401 |
Compound clamp ring for semiconductor wafers |
Semyon Sherstinsky, Mei Chang, Charles C. Harris, Alan F. Morrison, Virendra V. Rana +2 more |
1995-06-06 |
| 5316278 |
Clamping ring apparatus for processing semiconductor wafers |
Semyon Sherstinsky, Mei Chang, Charles C. Harris, Alfred Mak, James Roberts +1 more |
1994-05-31 |
| 4613400 |
In-situ photoresist capping process for plasma etching |
Ronald P. Reade, Jerry Wong, David N. Wang |
1986-09-23 |
