Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821338 | Particle beam biaxial orientation of a substrate for epitaxial crystal growth | Paul H. Berdahl, Richard E. Russo | 2004-11-23 |
| 6809066 | Ion texturing methods and articles | Paul H. Berdahl, Richard E. Russo, Leslie G. Fritzemeier | 2004-10-26 |
| 5432151 | Process for ion-assisted laser deposition of biaxially textured layer on substrate | Richard E. Russo, Stephen M. Garrison, Paul H. Berdahl | 1995-07-11 |
| 4613400 | In-situ photoresist capping process for plasma etching | Simon W. Tam, Jerry Wong, David N. Wang | 1986-09-23 |