| 8367565 |
Methods and systems of transferring, docking and processing substrates |
Lawrence Chung-Lai Lei, Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak +4 more |
2013-02-05 |
| 8268734 |
Methods and systems of transferring, docking and processing substrates |
Lawrence Chung-Lai Lei, Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak +4 more |
2012-09-18 |
| 7897525 |
Methods and systems of transferring, docking and processing substrates |
Lawrence Chung-Lai Lei, Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak +4 more |
2011-03-01 |
| 6517592 |
Cold trap assembly |
Salvador P. Umotoy, Lawrence Chung-Lai Lei, Russell C. Ellwanger, Joel M. Huston, James Jin-Long Chen |
2003-02-11 |
| 6379466 |
Temperature controlled gas distribution plate |
Turgut Sahin, Salvador P. Umotoy, Avi Tepman |
2002-04-30 |
| 6271148 |
Method for improved remote microwave plasma source for use with substrate processing system |
Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Calvin Augason, Joseph Yudovsky |
2001-08-07 |
| 6223447 |
Fastening device for a purge ring |
Joseph Yudovsky, Salvador P. Umotoy, Lawrence Chung-Lai Lei |
2001-05-01 |
| 6206971 |
Integrated temperature controlled exhaust and cold trap assembly |
Salvador P. Umotoy, Lawrence Chung-Lai Lei, Russell C. Ellwanger, Joel M. Huston, James Jin-Long Chen |
2001-03-27 |
| 6026762 |
Apparatus for improved remote microwave plasma source for use with substrate processing systems |
Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Calvin Augason, Joseph Yudovsky |
2000-02-22 |
| 5522937 |
Welded susceptor assembly |
Sandy M. Chew, Dale R. DuBois, Manus Wong |
1996-06-04 |
| 5326725 |
Clamping ring and susceptor therefor |
Semyon Sherstinsky, Charles C. Harris, Mei Chang, Dale R. Du Bois, James Roberts +3 more |
1994-07-05 |
