Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626314 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Tuqiang Ni, Rubin Ye, Jie Liang, Leyi Tu, Ziyang Wu | 2023-04-11 |
| 6170428 | Symmetric tunable inductively coupled HDP-CVD reactor | Fred C. Redeker, Farhad Moghadam, Hiroji Hanawa, Tetsuya Ishikawa, Dan Maydan +5 more | 2001-01-09 |
| 6083344 | Multi-zone RF inductively coupled source configuration | Hiroji Hanawa, Tetsuya Ishikawa, Shijian Li, Kaveh Niazi, Kenneth Smyth +3 more | 2000-07-04 |
| 5891253 | Corrosion resistant apparatus | Sandy M. Chew | 1999-04-06 |
| 5761023 | Substrate support with pressure zones having reduced contact area and temperature feedback | Brian Lue, Tetsuya Ishikawa, Fred C. Redeker, Shijian Li | 1998-06-02 |
| 5593541 | Method of manufacturing using corrosion-resistant apparatus comprising rhodium | Sandy M. Chew | 1997-01-14 |
| 5522932 | Corrosion-resistant apparatus | Sandy M. Chew | 1996-06-04 |
| 5522937 | Welded susceptor assembly | Sandy M. Chew, Dale R. DuBois, Ronald L. Rose | 1996-06-04 |
| 5332443 | Lift fingers for substrate processing apparatus | Sandy M. Chew, Shane D. Clark, Ron Rose, Dale R. DuBois, Cissy Leung +1 more | 1994-07-26 |