Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087548 | Plasma reactor | Rubin Ye, Kuan Yang | 2024-09-10 |
| 11875970 | Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus | Longbao Chen, Jie Liang, Weina Wang | 2024-01-16 |
| 11682541 | Radio frequency power supply system, plasma processor, and frequency-tuning matching | Tuqiang Ni, Lei Xu | 2023-06-20 |
| 11626314 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Tuqiang Ni, Rubin Ye, Manus Wong, Jie Liang, Ziyang Wu | 2023-04-11 |
| 11545342 | Plasma processor and processing method | Tuqiang Ni | 2023-01-03 |