Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087548 | Plasma reactor | Leyi Tu, Kuan Yang | 2024-09-10 |
| 11626314 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Tuqiang Ni, Manus Wong, Jie Liang, Leyi Tu, Ziyang Wu | 2023-04-11 |
| 10593520 | Temperature adjusting apparatus and method for a focus ring | Lei Wu, Bryan Pu | 2020-03-17 |