| 12218647 |
Microelectromechanical resonator |
Joseph C. Doll, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill |
2025-02-04 |
| 12166464 |
Piezo-actuated MEMS resonator with reduced nonlinear tcf |
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Charles I. Grosjean |
2024-12-10 |
| 11975965 |
MEMS resonator |
Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll |
2024-05-07 |
| 11916534 |
Microelectromechanical resonator |
Joseph C. Doll, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill |
2024-02-27 |
| 11909376 |
Piezo-actuated MEMS resonator |
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Charles I. Grosjean |
2024-02-20 |
| 11724934 |
MEMS resonator |
Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll |
2023-08-15 |
| 11677379 |
Microelectromechanical resonator |
Joseph C. Doll, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill |
2023-06-13 |
| 11584642 |
MEMS resonator |
Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll |
2023-02-21 |
| 11312622 |
MEMS with over-voltage protection |
Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge |
2022-04-26 |
| 11228298 |
Microelectromechanical resonator |
Joseph C. Doll, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill |
2022-01-18 |
| 10892733 |
Piezo-actuated MEMS resonator with surface electrodes |
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Charles I. Grosjean |
2021-01-12 |
| 10737934 |
MEMS with over-voltage protection |
Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge |
2020-08-11 |
| 10676349 |
MEMS resonator |
Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll |
2020-06-09 |
| 10263596 |
Temperature-engineered MEMS resonator |
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Charles I. Grosjean |
2019-04-16 |
| 10218333 |
Microelectromechanical resonator |
Joseph C. Doll, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill |
2019-02-26 |
| 9712128 |
Microelectromechanical resonator |
Joseph C. Doll, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill |
2017-07-18 |
| 9705470 |
Temperature-engineered MEMS resonator |
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Charles I. Grosjean |
2017-07-11 |
| 5320680 |
Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow |
Arthur J. Learn, Dale R. Du Bois, Richard A. Seilheimer |
1994-06-14 |
| 4794019 |
Refractory metal deposition process |
— |
1988-12-27 |
| 4547404 |
Chemical vapor deposition process |
Bryant A. Campbell |
1985-10-15 |
| 4545327 |
Chemical vapor deposition apparatus |
Bryant A. Campbell |
1985-10-08 |
| 4539933 |
Chemical vapor deposition apparatus |
Bryant A. Campbell, Dale R. DuBois, Ralph F. Manriquez |
1985-09-10 |
| 4524719 |
Substrate loading means for a chemical vapor deposition apparatus |
Bryant A. Campbell, Dale R. DuBois, Ralph F. Manriquez |
1985-06-25 |
