Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5320680 | Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow | Arthur J. Learn, Dale R. Du Bois, Nicholas Miller | 1994-06-14 |
| 5280983 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, David Cheng, Edward M. Abolnikov +5 more | 1994-01-25 |
| 5224809 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, David Cheng, Edward M. Abolnikov +5 more | 1993-07-06 |
| 4911597 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, David Cheng, Edward M. Abolnikov +5 more | 1990-03-27 |