| 12391543 |
Resonant elements and oscillators |
Renata Melamud Berger, Paul M. Hagelin, Charles I. Grosjean, Aaron Partridge, Joseph C. Doll +1 more |
2025-08-19 |
| 12351452 |
MEMS with small-molecule barricade |
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Aaron Partridge |
2025-07-08 |
| 12218647 |
Microelectromechanical resonator |
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin |
2025-02-04 |
| 12166464 |
Piezo-actuated MEMS resonator with reduced nonlinear tcf |
Joseph C. Doll, Paul M. Hagelin, Nicholas Miller, Charles I. Grosjean |
2024-12-10 |
| 12095447 |
MEMS resonator with colocated temperature sensor |
Charles I. Grosjean, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz |
2024-09-17 |
| 11975965 |
MEMS resonator |
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Joseph C. Doll |
2024-05-07 |
| 11916534 |
Microelectromechanical resonator |
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin |
2024-02-27 |
| 11909376 |
Piezo-actuated MEMS resonator |
Joseph C. Doll, Paul M. Hagelin, Nicholas Miller, Charles I. Grosjean |
2024-02-20 |
| 11897757 |
MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation |
Renata Melamud Berger, Paul M. Hagelin, Charles I. Grosjean, Aaron Partridge, Joseph C. Doll +1 more |
2024-02-13 |
| 11807518 |
Multi-die integrated circuit package |
Renata Melamud Berger, Paul M. Hagelin, Charles I. Grosjean, Aaron Partridge, Joseph C. Doll +1 more |
2023-11-07 |
| 11770112 |
MEMS resonator with co-located temperature sensor |
Charles I. Grosjean, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz |
2023-09-26 |
| 11731869 |
MEMS with small-molecule barricade |
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Aaron Partridge |
2023-08-22 |
| 11724934 |
MEMS resonator |
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Joseph C. Doll |
2023-08-15 |
| 11718518 |
MEMS with small-molecule barricade |
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Aaron Partridge |
2023-08-08 |
| 11677379 |
Microelectromechanical resonator |
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin |
2023-06-13 |
| 11584642 |
MEMS resonator |
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Joseph C. Doll |
2023-02-21 |
| 11312622 |
MEMS with over-voltage protection |
Nicholas Miller, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge |
2022-04-26 |
| 11228298 |
Microelectromechanical resonator |
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin |
2022-01-18 |
| 10892733 |
Piezo-actuated MEMS resonator with surface electrodes |
Joseph C. Doll, Paul M. Hagelin, Nicholas Miller, Charles I. Grosjean |
2021-01-12 |
| 10800650 |
MEMS with small-molecule barricade |
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Aaron Partridge |
2020-10-13 |
| 10737934 |
MEMS with over-voltage protection |
Nicholas Miller, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge |
2020-08-11 |
| 10676349 |
MEMS resonator |
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Joseph C. Doll |
2020-06-09 |
| 10476477 |
Dual-resonator semiconductor die |
Charles I. Grosjean, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz |
2019-11-12 |
| 10263596 |
Temperature-engineered MEMS resonator |
Joseph C. Doll, Paul M. Hagelin, Nicholas Miller, Charles I. Grosjean |
2019-04-16 |
| 10218333 |
Microelectromechanical resonator |
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin |
2019-02-26 |