Issued Patents All Time
Showing 1–25 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12391543 | Resonant elements and oscillators | Renata Melamud Berger, Ginel C. Hill, Paul M. Hagelin, Aaron Partridge, Joseph C. Doll +1 more | 2025-08-19 |
| 12351452 | MEMS with small-molecule barricade | Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge | 2025-07-08 |
| 12301207 | Techniques for adding compensating material(s) in semiconductor devices | Paul M. Hagelin | 2025-05-13 |
| 12218647 | Microelectromechanical resonator | Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill | 2025-02-04 |
| 12216016 | Frequency-modulating sensor array | Paul M. Hagelin, Lev Goncharov | 2025-02-04 |
| 12187606 | MEMS cavity with non-contaminating seal | Michael Julian Daneman, Paul M. Hagelin | 2025-01-07 |
| 12166464 | Piezo-actuated MEMS resonator with reduced nonlinear tcf | Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller | 2024-12-10 |
| 12101062 | Temperature-reporting oscillator | Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany | 2024-09-24 |
| 12095447 | MEMS resonator with colocated temperature sensor | Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz | 2024-09-17 |
| 12000748 | Frequency-modulating sensor array | Paul M. Hagelin, Lev Goncharov | 2024-06-04 |
| 11975965 | MEMS resonator | Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll | 2024-05-07 |
| 11916534 | Microelectromechanical resonator | Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill | 2024-02-27 |
| 11909354 | Ovenized MEMS | Carl Arft, Aaron Partridge, Markus Lutz | 2024-02-20 |
| 11909376 | Piezo-actuated MEMS resonator | Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller | 2024-02-20 |
| 11897757 | MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation | Renata Melamud Berger, Ginel C. Hill, Paul M. Hagelin, Aaron Partridge, Joseph C. Doll +1 more | 2024-02-13 |
| 11869870 | Bonding process with inhibited oxide formation | Paul M. Hagelin | 2024-01-09 |
| 11871369 | Time module apparatus for use with fixed-beacon time transfer system | Markus Lutz, Sassan Tabatabaei, Paul M. Hagelin, Aaron Partridge | 2024-01-09 |
| 11807518 | Multi-die integrated circuit package | Renata Melamud Berger, Ginel C. Hill, Paul M. Hagelin, Aaron Partridge, Joseph C. Doll +1 more | 2023-11-07 |
| 11770112 | MEMS resonator with co-located temperature sensor | Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz | 2023-09-26 |
| 11764751 | Temperature stable MEMS resonator | Paul M. Hagelin | 2023-09-19 |
| 11747229 | Frequency-modulating sensor array | Paul M. Hagelin, Lev Goncharov | 2023-09-05 |
| 11731869 | MEMS with small-molecule barricade | Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge | 2023-08-22 |
| 11724934 | MEMS resonator | Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll | 2023-08-15 |
| 11718518 | MEMS with small-molecule barricade | Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge | 2023-08-08 |
| 11677379 | Microelectromechanical resonator | Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill | 2023-06-13 |