Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646698 | Temperature-reporting oscillator | Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany | 2023-05-09 |
| 11618675 | MEMS cavity with non-contaminating seal | Michael Julian Daneman, Paul M. Hagelin | 2023-04-04 |
| 11609136 | Frequency-modulating sensor array | Paul M. Hagelin, Lev Goncharov | 2023-03-21 |
| 11584642 | MEMS resonator | Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll | 2023-02-21 |
| 11488930 | Bonding process with inhibited oxide formation | Paul M. Hagelin | 2022-11-01 |
| 11469734 | Temperature stable MEMS resonator | Paul M. Hagelin | 2022-10-11 |
| 11374535 | Ovenized MEMS | Carl Arft, Aaron Partridge, Markus Lutz | 2022-06-28 |
| 11320329 | Frequency-modulating sensor array | Paul M. Hagelin, Lev Goncharov | 2022-05-03 |
| 11312622 | MEMS with over-voltage protection | Nicholas Miller, Ginel C. Hill, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge | 2022-04-26 |
| 11245361 | Temperature-reporting oscillator | Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany | 2022-02-08 |
| 11228298 | Microelectromechanical resonator | Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill | 2022-01-18 |
| 11220425 | MEMS cavity with non-contaminating seal | Michael Julian Daneman, Paul M. Hagelin | 2022-01-11 |
| 11218984 | Fixed-beacon time transfer system | Markus Lutz, Sassan Tabatabaei, Paul M. Hagelin, Aaron Partridge | 2022-01-04 |
| 11082024 | Temperature stable mems resonator | Paul M. Hagelin | 2021-08-03 |
| 10910341 | Bonding process with inhibited oxide formation | Paul M. Hagelin | 2021-02-02 |
| 10892733 | Piezo-actuated MEMS resonator with surface electrodes | Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller | 2021-01-12 |
| 10833632 | Temperature-reporting oscillator | Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany | 2020-11-10 |
| 10800650 | MEMS with small-molecule barricade | Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge | 2020-10-13 |
| 10737934 | MEMS with over-voltage protection | Nicholas Miller, Ginel C. Hill, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge | 2020-08-11 |
| 10696547 | MEMS cavity with non-contaminating seal | Michael Julian Daneman, Paul M. Hagelin | 2020-06-30 |
| 10676349 | MEMS resonator | Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll | 2020-06-09 |
| 10541666 | Temperature stable MEMS resonator | Paul M. Hagelin | 2020-01-21 |
| 10541224 | Bonding process with inhibited oxide formation | Paul M. Hagelin | 2020-01-21 |
| 10476477 | Dual-resonator semiconductor die | Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz | 2019-11-12 |
| 10263596 | Temperature-engineered MEMS resonator | Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller | 2019-04-16 |