Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10218333 | Microelectromechanical resonator | Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill | 2019-02-26 |
| 10192850 | Bonding process with inhibited oxide formation | Paul M. Hagelin | 2019-01-29 |
| 9948273 | Temperature stable MEMS resonator | Paul M. Hagelin | 2018-04-17 |
| 9774313 | Laterally-doped MEMS resonator | Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz | 2017-09-26 |
| 9712128 | Microelectromechanical resonator | Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill | 2017-07-18 |
| 9705470 | Temperature-engineered MEMS resonator | Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller | 2017-07-11 |
| 9695036 | Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same | Renata Melamud Berger, Ginel C. Hill, Paul M. Hagelin, Aaron Partridge, Joseph C. Doll +1 more | 2017-07-04 |
| 9548720 | Temperature stable MEMS resonator | Paul M. Hagelin | 2017-01-17 |
| 9148073 | Temperature stable MEMS resonator | Paul M. Hagelin | 2015-09-29 |
| 8916407 | MEMS device and method of manufacturing same | Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz | 2014-12-23 |
| 8667665 | Method of manufacturing a microelectromechanical system (MEMS) resonator | Paul M. Hagelin | 2014-03-11 |
| 8234774 | Method for fabricating a microelectromechanical system (MEMS) resonator | Paul M. Hagelin | 2012-08-07 |
| 7817882 | Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof | Henry A. Blauvlet, David W. Vernooy, Joel S. Paslaski, Hao-Ming Lee, Franklin Monzon +1 more | 2010-10-19 |
| 7599585 | Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof | Henry A. Blauvelt, David W. Vernooy, Joel S. Paslaski, Hao-Ming Lee, Franklin Monzon +1 more | 2009-10-06 |
| 7544531 | Ground strap for suppressing stiction during MEMS fabrication | — | 2009-06-09 |
| 7233713 | Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof | Henry A. Blauvelt, David W. Vernooy, Joel S. Paslaski, Hao-Ming Lee, Franklin Monzon +1 more | 2007-06-19 |
| 6985646 | Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof | Henry A. Blauvelt, David W. Vernooy, Joel S. Paslaski, Hao-Ming Lee, Franklin Monzon +1 more | 2006-01-10 |
| 6870992 | Alignment apparatus and methods for transverse optical coupling | Guido Hunziker, Paul Bridger, Oskar Painter | 2005-03-22 |
| 6699394 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Xuan-Qi Wang | 2004-03-02 |
| 6612535 | MEMS valve | Yu-Chong Tai, Xing YANG | 2003-09-02 |
| 6536213 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Xuan-Qi Wang | 2003-03-25 |
| 6520753 | Planar micropump | Yu-Chong Tai | 2003-02-18 |
| 6499297 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Xuan-Qi Wang | 2002-12-31 |
| 6345502 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Xuan-Qi Wang | 2002-02-12 |
| 6334761 | Check-valved silicon diaphragm pump and method of fabricating the same | Yu-Chong Tai, Ellis Meng, Xuan-Qi Wang | 2002-01-01 |