Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599574 | Method and apparatus for forming a dielectric film using helium as a carrier gas | Ellie Yieh, Paul Edward Gee, Li-Qun Xia, Francimar Campana, Dana Tribula +1 more | 2003-07-29 |
| 6300255 | Method and apparatus for processing semiconductive wafers | Scott A. Hendrickson, Inna Shmurun, Son T. Nguyen | 2001-10-09 |