Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315739 | Isotropic silicon nitride removal | Mikhail Korolik, Wei Ying Doreen Yong, Tuck Foong Koh, John Sudijono, Philip Allan Kraus +1 more | 2025-05-27 |
| 8716154 | Reduced pattern loading using silicon oxide multi-layers | Sidharth Bhatia, Shankar Venkataraman | 2014-05-06 |
| 8664127 | Two silicon-containing precursors for gapfill enhancing dielectric liner | Sidharth Bhatia, Hiroshi Hamana, Shankar Venkataraman | 2014-03-04 |
| 8476142 | Preferential dielectric gapfill | Sasha Kweskin, Hiroshi Hamana, Shankar Venkataraman, Kadar Sapre | 2013-07-02 |
| 8236708 | Reduced pattern loading using bis(diethylamino)silane (C8H22N2Si) as silicon precursor | Sasha Kweskin, Shankar Venkataraman, Kedar Sapre | 2012-08-07 |
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Shankar Venkataraman, Hiroshi Hamana, Manuel A. Hernandez, Nitin K. Ingle | 2011-09-06 |
| 7994019 | Silicon-ozone CVD with reduced pattern loading using incubation period deposition | Sasha Kweskin, Shankar Venkataraman, Kedar Sapre | 2011-08-09 |
| 7825038 | Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen | Nitin K. Ingle, Zheng Yuan, Kedar Sapre | 2010-11-02 |
| 6599574 | Method and apparatus for forming a dielectric film using helium as a carrier gas | Ellie Yieh, Li-Qun Xia, Francimar Campana, Shankar Venkataranan, Dana Tribula +1 more | 2003-07-29 |
| 6153540 | Method of forming phosphosilicate glass having a high wet-etch rate | Ishing Lou, Cary Ching, Peter Wai-Man Lee, Rong Pan, Francimar Campana | 2000-11-28 |
| 6099647 | Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films | Ellie Yieh, Li-Qun Xia, Bang Nguyen | 2000-08-08 |
| 5994209 | Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films | Ellie Yieh, Li-Qun Xia, Bang Nguyen | 1999-11-30 |