Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7200460 | Method of depositing low dielectric constant silicon carbide layers | Srinivas D. Nemani, Michael Chapin, Shankar Venkataraman | 2007-04-03 |
| 6855484 | Method of depositing low dielectric constant silicon carbide layers | Srinivas D. Nemani, Michael Chapin, Shankar Venkataraman | 2005-02-15 |
| 6599574 | Method and apparatus for forming a dielectric film using helium as a carrier gas | Ellie Yieh, Paul Edward Gee, Li-Qun Xia, Shankar Venkataranan, Dana Tribula +1 more | 2003-07-29 |
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Himanshu Pokharna, Shankar Chandran, Srinivas D. Nemani, Chen-An Chen, Ellie Yieh +1 more | 2003-07-22 |
| 6537733 | Method of depositing low dielectric constant silicon carbide layers | Srinivas D. Nemani, Michael Chapin, Shankar Venkataraman | 2003-03-25 |
| 6426015 | Method of reducing undesired etching of insulation due to elevated boron concentrations | Li-Qun Xia, Ellie Yieh | 2002-07-30 |
| 6261975 | Method for depositing and planarizing fluorinated BPSG films | Li-Qun Xia, Ellie Yieh | 2001-07-17 |
| 6218268 | Two-step borophosphosilicate glass deposition process and related devices and apparatus | Li-Qun Xia, Ellie Yieh, Maria Galiano, Shankar Chandran | 2001-04-17 |
| 6153540 | Method of forming phosphosilicate glass having a high wet-etch rate | Ishing Lou, Cary Ching, Peter Wai-Man Lee, Rong Pan, Paul Edward Gee | 2000-11-28 |
| 6090206 | Throttle valve providing enhanced cleaning | Won Bae Bang, Matthew Losey, Srinivas D. Nemani, Sundar Pichai | 2000-07-18 |