Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277347 | Use of ozone in process effluent abatement | Ranald Stearns, Gary Sypherd, Stuardo Robles | 2001-08-21 |
| 6218268 | Two-step borophosphosilicate glass deposition process and related devices and apparatus | Li-Qun Xia, Ellie Yieh, Francimar Campana, Shankar Chandran | 2001-04-17 |
| 6177344 | BPSG reflow method to reduce thermal budget for next generation device including heating in a steam ambient | Li-Qun Xia, Richard A. Conti, Ellie Yieh | 2001-01-23 |
| 6009827 | Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films | Stuardo Robles, Visweswaren Sivaramakrishnan, Victoria Kithcart | 2000-01-04 |
| 5902494 | Method and apparatus for reducing particle generation by limiting DC bias spike | Anand Gupta, Stefan Wolff | 1999-05-11 |
| 5814377 | Method and apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films | Stuardo Robles, Visweswaren Sivaramakrishnan, Victoria Kithcart | 1998-09-29 |
| 5356722 | Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity | Bang Nguyen, Ellie Yieh | 1994-10-18 |