Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8617989 | Liner property improvement | Kedar Sapre, Lei Luo | 2013-12-31 |
| 8404583 | Conformality of oxide layers along sidewalls of deep vias | Zhong Qiang Hua, Lei Luo, Kedar Sapre | 2013-03-26 |
| 8114761 | Method for doping non-planar transistors | Tushar Mandrekar, Shankar Venkataraman, Zhong Qiang Hua | 2012-02-14 |
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Shankar Venkataraman, Hiroshi Hamana, Nitin K. Ingle, Paul Edward Gee | 2011-09-06 |
| 7201936 | Method of feedback control of sub-atmospheric chemical vapor deposition processes | Alexander T. Schwarm, Arulkumar Shanmugasundram, Rong Pan, Amna Mohammad | 2007-04-10 |
| 6541401 | Wafer pretreatment to decrease rate of silicon dioxide deposition on silicon nitride compared to silicon substrate | Scott Brad Herner | 2003-04-01 |