Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Errol C. Sanchez, Kin Pong Lo | 2024-10-22 |
| 11309404 | Integrated CMOS source drain formation with advanced control | Benjamin Colombeau, Patricia M. Liu, Suketu Arun Parikh, Matthias Bauer, Dimitri Kioussis +2 more | 2022-04-19 |
| 11195923 | Method of fabricating a semiconductor device having reduced contact resistance | Gaurav Thareja, Xuebin Li, Abhishek Dube, Yi-Chiau Huang, Andy Lo +3 more | 2021-12-07 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Errol C. Sanchez, Kin Pong Lo | 2021-11-02 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Kin Pong Lo, Errol C. Sanchez, Schubert S. Chu | 2021-06-29 |
| 8114761 | Method for doping non-planar transistors | Shankar Venkataraman, Zhong Qiang Hua, Manuel A. Hernandez | 2012-02-14 |
| 6433314 | Direct temperature control for a component of a substrate processing chamber | Anish Tolia, Nitin Khurana | 2002-08-13 |
| 6423201 | Method of improving the adhesion of copper | — | 2002-07-23 |
| 6375753 | Method and apparatus for removing processing liquid from a processing liquid delivery line | Anish Tolia, Michael S. Jackson | 2002-04-23 |
| 6345642 | Method and apparatus for removing processing liquid from a processing liquid path | Ted G. Yoshidome, Nitin Khurana, Anish Tolia | 2002-02-12 |
| 6305392 | Method and apparatus for removing processing liquid from a processing liquid delivery line | Anish Tolia, Michael S. Jackson | 2001-10-23 |
| 6117245 | Method and apparatus for controlling cooling and heating fluids for a gas distribution plate | Anish Tolia, Nitin Khurana | 2000-09-12 |