Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659765 | Enhancement of modulus and hardness for UV-cured ultra low-k dielectric films | Kang Sub Yim, Kelvin Chan, Alexandros T. Demos, Priyanka DASH | 2017-05-23 |
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-11-29 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-06-14 |
| 8753449 | Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film | Scott A. Hendrickson, Sanjeev Baluja, Tsutomu Kiyohara, Juan Carlos Rocha-Alvarez, Alexandros T. Demos | 2014-06-17 |