Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658016 | Shield for a substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Goichi Yoshidome, Adolph Miller Allen | 2023-05-23 |
| 9127362 | Process kit and target for substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Goichi Yoshidome, Adolph Miller Allen | 2015-09-08 |
| 7981262 | Process kit for substrate processing chamber | Ilyoung (Richard) Hong | 2011-07-19 |
| 7901552 | Sputtering target with grooves and intersecting channels | — | 2011-03-08 |
| 7767064 | Position controlled dual magnetron | Winsor Lam, Tza-Jing Gung, Hong Yang, Ilyoung Richard Hong | 2010-08-03 |