| 11658016 |
Shield for a substrate processing chamber |
Kathleen Scheible, Goichi Yoshidome, Adolph Miller Allen, Cristopher M. Pavloff |
2023-05-23 |
| 10347475 |
Holding assembly for substrate processing chamber |
Kathleen Scheible, Goichi Yoshidome, Adolph Miller Allen, Christopher Pavloff |
2019-07-09 |
| 9127362 |
Process kit and target for substrate processing chamber |
Kathleen Scheible, Goichi Yoshidome, Adolph Miller Allen, Cristopher M. Pavloff |
2015-09-08 |
| 8900427 |
Homing device for magnetron rotating on two arms |
Keith A. Miller, Hari Ponnekanti |
2014-12-02 |
| 8605852 |
Wedge positioning apparatus for jet pump assemblies in nuclear reactors |
Stephen J. Kaylor, James M. DuBay, Rodney Lum |
2013-12-10 |
| 8021527 |
Coaxial shafts for radial positioning of rotating magnetron |
Keith A. Miller, Hari Ponnekanti |
2011-09-20 |
| 5864595 |
Actuator for facilitating performance of work in a nuclear reactor |
Brian H. Burrows, Neal Goldberg, Michael Y. Suekawa |
1999-01-26 |
