| 12033835 |
Modular microwave source with multiple metal housings |
Philip Allan Kraus, Robert B. Moore, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta +1 more |
2024-07-09 |
| 11835927 |
Reducing substrate surface scratching using machine learning |
Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Adolph Miller Allen, Xinyuan Chong +5 more |
2023-12-05 |
| 11810766 |
Protection of aluminum process chamber components |
Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Kartik Shah, Umesh M. Kelkar +3 more |
2023-11-07 |
| 11591689 |
Method for fabricating chamber parts |
Mats Larsson, Kevin A. PAPKE, Chirag Shaileshbhai KHAIRNAR, Rajasekhar PATIBANDLA, Balamurugan Ramasamy +2 more |
2023-02-28 |
| 11586160 |
Reducing substrate surface scratching using machine learning |
Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Adolph Miller Allen, Xinyuan Chong +5 more |
2023-02-21 |
| 11274377 |
Seal apparatus for an electroplating system |
Kyle M. Hanson, Manjunatha Vishwanatha Adagoor, Karthick Vasu, Shailesh Chouriya |
2022-03-15 |
| 11239058 |
Protective layers for processing chamber components |
Balamurugan Ramasamy, Kartik Shah, Mats Larsson, Kevin A. PAPKE, Rajasekhar PATIBANDLA +2 more |
2022-02-01 |
