Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810766 | Protection of aluminum process chamber components | Karthikeyan Balaraman, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Kartik Shah, Umesh M. Kelkar +3 more | 2023-11-07 |
| 11239058 | Protective layers for processing chamber components | Karthikeyan Balaraman, Balamurugan Ramasamy, Kartik Shah, Mats Larsson, Kevin A. PAPKE +2 more | 2022-02-01 |