Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170186 | Showerhead assembly with heated showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Chandrashekara Baginagere, Ramcharan Sundar +1 more | 2024-12-17 |
| 11810766 | Protection of aluminum process chamber components | Karthikeyan Balaraman, Sathyanarayana Bindiganavale, Balamurugan Ramasamy, Kartik Shah, Umesh M. Kelkar +3 more | 2023-11-07 |
| 11591689 | Method for fabricating chamber parts | Mats Larsson, Kevin A. PAPKE, Chirag Shaileshbhai KHAIRNAR, Karthikeyan Balaraman, Balamurugan Ramasamy +2 more | 2023-02-28 |
| 11239058 | Protective layers for processing chamber components | Karthikeyan Balaraman, Balamurugan Ramasamy, Kartik Shah, Mats Larsson, Kevin A. PAPKE +2 more | 2022-02-01 |