Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170186 | Showerhead assembly with heated showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Chandrashekara Baginagere, Yunho Kim +1 more | 2024-12-17 |
| 11946140 | Hot showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Arun Kumar Kotrappa, Steven Mosbrucker +5 more | 2024-04-02 |
| 11335543 | RF return path for reduction of parasitic plasma | Anantha K. Subramani, Arun Kumar Kotrappa, Hanish Kumar | 2022-05-17 |