Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335543 | RF return path for reduction of parasitic plasma | Anantha K. Subramani, Arun Kumar Kotrappa, Ramcharan Sundar | 2022-05-17 |
| 10662529 | Cooled gas feed block with baffle and nozzle for HDP-CVD | Govinda Raj, Lin Zhang, Stanley Wu | 2020-05-26 |
| 10190701 | Corrosion control for chamber components | Govinda Raj, Lin Zhang, Stanley Wu | 2019-01-29 |
| 9513645 | Managed multi-phase operation | Daniel Joseph Daley, Craig A. Colopy, Christopher J. Coughlin, Gavin Ray Kinsley, Zhongmin Du | 2016-12-06 |