Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11946140 | Hot showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Steven Mosbrucker +5 more | 2024-04-02 |
| 11335543 | RF return path for reduction of parasitic plasma | Anantha K. Subramani, Hanish Kumar, Ramcharan Sundar | 2022-05-17 |