Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11946138 | Vacuum valve and apparatus for fabricating semiconductor having the same | Jaeheung LEE, Junseong Park, Kanghun LEE, Seongwan Kim | 2024-04-02 |
| 10413946 | Furnace-type semiconductor apparatus, method of cleaning the same, and method of forming thin film using the same | Youngil Kwon, Giduck Kweon, Jong Il Park, Inwoo Seo, Wooksung Son | 2019-09-17 |