Methods and apparatus for processing a substrate

Assignee

• Applied Materials

Inventors

• Abdullah Zafar (3 patents)
• William J. Durand (11 patents)
• Xinyuan Chong (7 patents)
• Kenric Choi (22 patents)
• Weize Hu (12 patents)
• Kelvin Chan (72 patents)
• Amir Bayati (18 patents)
• Unknown
• Philip Allan Kraus (114 patents)
• Adolph Miller Allen (42 patents)

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