Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431338 | Composite structures for semiconductor process chambers | Tianshu LI, Yikai Chen, Aniruddha Pal, Yao-Hung YANG | 2025-09-30 |
| D1027120 | Seal for an assembly in a vapor deposition chamber | Yao-Hung YANG, Eric Ruhland, Dien-Yeh Wu, Philip Wayne Nagle, Aniruddha Pal +4 more | 2024-05-14 |