Film stress control for plasma enhanced chemical vapor deposition

Assignee

• Applied Materials

Inventors

• Chien-Teh Kao (51 patents)
• Tae Kyung Won (54 patents)
• Carl A. Sorensen (62 patents)
• Sanjay Yadav (23 patents)
• Young Dong LEE (14 patents)
• Shinichi Kurita (132 patents)
• Soo Young Choi (176 patents)

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