{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Integrated substrate transfer module", "item": "https://www.patentleaderboard.com/patent/7330021"}]}
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Integrated substrate transfer module

US Patent 7330021 · Granted Feb 12, 2008

Estimated economic value: $31,292,000 ⓘ

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