| 10434629 |
Roughened substrate support |
Dongsuh Lee, Beom Soo Park, Soo Young Choi |
2019-10-08 |
| D756502 |
Gas diffuser assembly |
Dongsuh Lee, Beom Soo Park, Yi Cui |
2016-05-17 |
| 8251009 |
Shadow frame having alignment inserts |
Lan Anh Duong, John M. White |
2012-08-28 |
| 8206075 |
Methods and apparatus for sealing a chamber |
John M. White, Shinichi Kurita, Yoshiaki Tanase |
2012-06-26 |
| 7959735 |
Susceptor with insulative inserts |
Lan Anh Duong, Gaku Furuta |
2011-06-14 |
| 7845618 |
Valve door with ball coupling |
Sam Kim, Jae-Chull Lee, Paul J. Brown |
2010-12-07 |
| 7722925 |
Showerhead mounting to accommodate thermal expansion |
John M. White |
2010-05-25 |
| 7641247 |
End effector assembly for supporting a substrate |
Wendell T. Blonigan, Takayuki Matsumoto, Billy C. Leung |
2010-01-05 |
| 7282097 |
Slit valve door seal |
Yoshiaki Tanase, Paul Andrew Haworth |
2007-10-16 |
