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Methods and apparatus for providing a floating seal for chamber doors |
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Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors |
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Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
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End effector assembly for supporting a substrate |
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2010-01-05 |
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Curved slit valve door |
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2009-08-18 |
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Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
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2008-10-21 |
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Automatic lens inspection system |
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