Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9580956 | Methods and apparatus for providing a floating seal for chamber doors | David E. Berkstresser, Shinichi Kurita | 2017-02-28 |
| 8648977 | Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors | David E. Berkstresser, Shinichi Kurita | 2014-02-11 |
| 7834994 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake +4 more | 2010-11-16 |
| 7641247 | End effector assembly for supporting a substrate | Wendell T. Blonigan, Takayuki Matsumoto, William N. Sterling | 2010-01-05 |
| 7575220 | Curved slit valve door | Yoshiaki Tanase, Gregory Stephen Lewis, David E. Berkstresser | 2009-08-18 |
| 7440091 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake +4 more | 2008-10-21 |
| 6047082 | Automatic lens inspection system | Harvey E. Rhody, David Xu | 2000-04-04 |