| 6821562 |
Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus |
Richard E. Demaray, David F. Eline, Chandra Deshpandey |
2004-11-23 |
| 6494999 |
Magnetron sputtering apparatus with an integral cooling and pressure relieving cathode |
Philip G. Pitcher |
2002-12-17 |
| 6436509 |
Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus |
Richard E. Demaray, David F. Eline, Chandra Deshpandey |
2002-08-20 |
| 6402912 |
Sputtering target assembly |
Philip G. Pitcher |
2002-06-11 |
| 6199259 |
Autoclave bonding of sputtering target assembly |
Richard E. Demaray |
2001-03-13 |
| 6033483 |
Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus |
Richard E. Demaray, David F. Eline, Chandra Deshpandey |
2000-03-07 |
| 5799860 |
Preparation and bonding of workpieces to form sputtering targets and other assemblies |
Richard E. Demaray, Akihiro Hosokawa |
1998-09-01 |
| 5676803 |
Sputtering device |
Richard E. Demaray, David E. Berkstresser |
1997-10-14 |
| 5603816 |
Sputtering device and target with cover to hold cooling fluid |
Richard E. Demaray, David E. Berkstresser |
1997-02-18 |
| 5595337 |
Sputtering device and target with cover to hold cooling fluid |
Richard E. Demaray, David E. Berkstresser |
1997-01-21 |
| 5565071 |
Integrated sputtering target assembly |
Richard E. Demaray, David E. Berkstresser |
1996-10-15 |
| 5487822 |
Integrated sputtering target assembly |
Richard E. Demaray, David E. Berkstresser |
1996-01-30 |
| 5433835 |
Sputtering device and target with cover to hold cooling fluid |
Richard E. Demaray, David E. Berkstresser |
1995-07-18 |
