Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821562 | Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus | Richard E. Demaray, David F. Eline, Chandra Deshpandey | 2004-11-23 |
| 6494999 | Magnetron sputtering apparatus with an integral cooling and pressure relieving cathode | Philip G. Pitcher | 2002-12-17 |
| 6436509 | Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus | Richard E. Demaray, David F. Eline, Chandra Deshpandey | 2002-08-20 |
| 6402912 | Sputtering target assembly | Philip G. Pitcher | 2002-06-11 |
| 6199259 | Autoclave bonding of sputtering target assembly | Richard E. Demaray | 2001-03-13 |
| 6033483 | Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus | Richard E. Demaray, David F. Eline, Chandra Deshpandey | 2000-03-07 |
| 5799860 | Preparation and bonding of workpieces to form sputtering targets and other assemblies | Richard E. Demaray, Akihiro Hosokawa | 1998-09-01 |
| 5676803 | Sputtering device | Richard E. Demaray, David E. Berkstresser | 1997-10-14 |
| 5603816 | Sputtering device and target with cover to hold cooling fluid | Richard E. Demaray, David E. Berkstresser | 1997-02-18 |
| 5595337 | Sputtering device and target with cover to hold cooling fluid | Richard E. Demaray, David E. Berkstresser | 1997-01-21 |
| 5565071 | Integrated sputtering target assembly | Richard E. Demaray, David E. Berkstresser | 1996-10-15 |
| 5487822 | Integrated sputtering target assembly | Richard E. Demaray, David E. Berkstresser | 1996-01-30 |
| 5433835 | Sputtering device and target with cover to hold cooling fluid | Richard E. Demaray, David E. Berkstresser | 1995-07-18 |