Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Alignment of a shadow frame and large flat substrates on a heated support

Alignment of a shadow frame and large flat substrates on a heated support

US Patent 5611865 · Granted Mar 18, 1997

Estimated economic value: $51,702,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rapid ceramic processing techniques and equipment2025
Rapid ceramic processing techniques and equipment2024
Roll-aboard travel bag2024
Thermal and electrical management of battery packs2023
Gas diffusion shower head design for large area plasma enhanced chemical vapor d2023
RF choke for gas delivery to an RF driven electrode in a plasma processing appar2022
Roll-aboard garment bag2022
System and method for residual voltage control of electrostatic chucking assembl2021
Thermal and electrical management of battery packs2021
RF choke for gas delivery to an RF driven electrode in a plasma processing appar2021
Flip edge shadow frame2020
Full-area counter-flow heat exchange substrate support2020