Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8697189 | Method and apparatus for precision surface modification in nano-imprint lithography | Ren Xu, Charles Liu | 2014-04-15 |
| 6488824 | Sputtering apparatus and process for high rate coatings | Dennis R. Hollars, Martin Philip Rosenblum | 2002-12-03 |
| 5873989 | Methods and apparatus for linear scan magnetron sputtering | John L. Hughes, Gary A. Davis, Robert J. Kolenkow, Norman H. Pond, Robert E. Weiss | 1999-02-23 |
| 5611865 | Alignment of a shadow frame and large flat substrates on a heated support | John M. White, David E. Berkstresser | 1997-03-18 |
| 5352294 | Alignment of a shadow frame and large flat substrates on a support | John M. White, David E. Berkstresser | 1994-10-04 |
| 4483654 | Workpiece transfer mechanism | George R. Koch | 1984-11-20 |
| 4433951 | Modular loadlock | George R. Koch | 1984-02-28 |