Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6183831 | Hard disk vapor lube | Benjamin M. DeKoven, Richard E. Lavine | 2001-02-06 |
| 5873989 | Methods and apparatus for linear scan magnetron sputtering | Gary A. Davis, Robert J. Kolenkow, Carl T. Petersen, Norman H. Pond, Robert E. Weiss | 1999-02-23 |
| 5738767 | Substrate handling and processing system for flat panel displays | George L. Coad, Eric C. Lawson | 1998-04-14 |
| 5425611 | Substrate handling and processing system | Eric C. Lawson | 1995-06-20 |
| 5287914 | System for substrate cooling in an evacuated environment | — | 1994-02-22 |
| 5215420 | Substrate handling and processing system | Eric C. Lawson | 1993-06-01 |
| 5181556 | System for substrate cooling in an evacuated environment | — | 1993-01-26 |
| 5180478 | Sputter coating source | — | 1993-01-19 |
| 4981408 | Dual track handling and processing system | Thomas E. Shula, Carlos Rodriguez | 1991-01-01 |