| 10718052 |
Rotating disk reactor with ferrofluid seal for chemical vapor deposition |
Louise S. Barriss, Richard Comunale, Roger P. Fremgen, Alexander I. Gurary, Todd A. Luse +1 more |
2020-07-21 |
| 9057129 |
Implant method and implanter by using a variable aperture |
Zhimin Wan, Donald W. Berrian, Causon Ko-Chuan Jen |
2015-06-16 |
| 8987691 |
Ion implanter and ion implant method thereof |
Zhimin Wan, Don Berrian |
2015-03-24 |
| 8669539 |
Implant method and implanter by using a variable aperture |
Zhimin Wan, Don Berrian, Causon Ko-Chuan Jen |
2014-03-11 |
| 8304330 |
Method for low temperature ion implantation |
Zhimin Wan, Erik Collart |
2012-11-06 |
| 8124508 |
Method for low temperature ion implantation |
Zhimin Wan, Erik Collart |
2012-02-28 |
| 8039374 |
Method for low temperature ion implantation |
Zhimin Wan, Erik Collart |
2011-10-18 |
| 7381977 |
Ion beam profiler |
John W. Vanderpot, Donald W. Berrian |
2008-06-03 |
| 7323695 |
Reciprocating drive for scanning a workpiece |
John W. Vanderpot, Donald W. Berrian |
2008-01-29 |
| 7141809 |
Method for reciprocating a workpiece through an ion beam |
John W. Vanderpot, Donald W. Berrian |
2006-11-28 |
| 7135691 |
Reciprocating drive for scanning a workpiece through an ion beam |
John W. Vanderpot, Donald W. Berrian |
2006-11-14 |
| 6921907 |
Substrate positioning system |
John W. Vanderpot, Donald W. Berrian |
2005-07-26 |
| 6806479 |
Apparatus and method for reducing implant angle variations across a large wafer for a batch disk |
Zhimin Wan, Jiong Chen |
2004-10-19 |
| 6777687 |
Substrate positioning system |
John W. Vanderpot, Donald W. Berrian |
2004-08-17 |
| 6765219 |
Hybrid scanning system and methods for ion implantation |
Donald W. Berrian, John W. Vanderpot |
2004-07-20 |
| 6428262 |
Compact load lock system for ion beam processing of foups |
John W. Vanderpot |
2002-08-06 |
| 6082297 |
Encapsulated thermofoil heater apparatus and associated methods |
John W. Vanderpot |
2000-07-04 |
| 5996528 |
Method and apparatus for flowing gases into a manifold at high potential |
Donald W. Berrian, Robert Kaim |
1999-12-07 |
| 5984391 |
Microfeature wafer handling apparatus and methods |
John W. Vanderpot |
1999-11-16 |
| 5421889 |
Method and apparatus for inverting samples in a process |
Louise S. Barriss |
1995-06-06 |
| 4726689 |
Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment |
— |
1988-02-23 |
| 4680474 |
Method and apparatus for improved ion dose accuracy |
Norman L. Turner |
1987-07-14 |