Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361059 | Magnetic field fluctuation for beam smoothing | Xiao Bai, Zhimin Wan | 2019-07-23 |
| 9340870 | Magnetic field fluctuation for beam smoothing | Xiao Bai, Zhimin Wan | 2016-05-17 |
| 9057129 | Implant method and implanter by using a variable aperture | Zhimin Wan, John D. Pollock, Causon Ko-Chuan Jen | 2015-06-16 |
| 7772571 | Implant beam utilization in an ion implanter | Cheng-Hui Shen, Jiong Chen | 2010-08-10 |
| 7547898 | Particulate prevention in ion implantation | John W. Vanderpot | 2009-06-16 |
| 7381977 | Ion beam profiler | John D. Pollock, John W. Vanderpot | 2008-06-03 |
| 7323695 | Reciprocating drive for scanning a workpiece | John W. Vanderpot, John D. Pollock | 2008-01-29 |
| 7247863 | System and method for rapidly controlling the output of an ion source for ion implantation | — | 2007-07-24 |
| 7141809 | Method for reciprocating a workpiece through an ion beam | John W. Vanderpot, John D. Pollock | 2006-11-28 |
| 7135691 | Reciprocating drive for scanning a workpiece through an ion beam | John W. Vanderpot, John D. Pollock | 2006-11-14 |
| 6921907 | Substrate positioning system | John W. Vanderpot, John D. Pollock | 2005-07-26 |
| 6833552 | System and method for implanting a wafer with an ion beam | — | 2004-12-21 |
| 6777687 | Substrate positioning system | John W. Vanderpot, John D. Pollock | 2004-08-17 |
| 6765219 | Hybrid scanning system and methods for ion implantation | John D. Pollock, John W. Vanderpot | 2004-07-20 |
| 6677599 | System and method for uniformly implanting a wafer with an ion beam | — | 2004-01-13 |
| 6661016 | Ion implantation uniformity correction using beam current control | — | 2003-12-09 |
| 6580083 | High efficiency scanning in ion implanters | — | 2003-06-17 |
| 5996528 | Method and apparatus for flowing gases into a manifold at high potential | Robert Kaim, John D. Pollock | 1999-12-07 |
| RE36200 | Disposable electronic monitor device | Ernest Santin, William A. Tout, Peter M. Nunes, John W. Vanderpot | 1999-04-27 |
| 5806980 | Methods and apparatus for measuring temperatures at high potential | — | 1998-09-15 |
| 5789867 | Apparatus and method for igniting plasma in a process module | Han Westendorp, Hans Meiling, John W. Vanderpot | 1998-08-04 |
| 5565036 | Apparatus and method for igniting plasma in a process module | Han Westendorp, Hans Meiling, John W. Vanderpot | 1996-10-15 |
| 5313848 | Disposable electronic monitor device | Ernest Santin, William A. Tout, Peter M. Nunes, John W. Vanderpot | 1994-05-24 |
| 4980562 | Method and apparatus for high efficiency scanning in an ion implanter | Robert Kaim, John W. Vanderpot | 1990-12-25 |
| 4922106 | Ion beam scanning method and apparatus | Robert Kaim, John W. Vanderpot | 1990-05-01 |