Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8673777 | In-line deposition system and process for deposition of a thin film layer | Scott Daniel Feldman-Peabody, Christopher Rathweg | 2014-03-18 |
| 8597430 | Modular system and process for continuous deposition of a thin film layer on a substrate | Mark Jeffrey Pavol, Brian Murphy, Christopher Rathweg, Edwin Jackson Little, Max William Reed | 2013-12-03 |
| 8481355 | Modular system and process for continuous deposition of a thin film layer on a substrate | Mark Jeffrey Pavol, Brian Murphy, Christopher Rathweg, Edwin Jackson Little, Max William Reed | 2013-07-09 |
| 8460521 | Sputtering cathode having a non-bonded semiconducting target | Scott Daniel Feldman-Peabody, Robert Dwayne Gossman, Patrick Lynch O'Keefe | 2013-06-11 |
| 8430963 | Cool-down system and method for a vapor deposition system | Jason Scott Paulman, Mark Jeffrey Pavol | 2013-04-30 |
| 8430966 | Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate | Christopher Rathweg, Max William Reed, Mark Jeffrey Pavol, Scott Daniel Feldman-Peabody | 2013-04-30 |
| 8409407 | Methods for high-rate sputtering of a compound semiconductor on large area substrates | Sean Timothy Halloran, Robert Dwayne Gossman | 2013-04-02 |
| 8361232 | Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate | — | 2013-01-29 |
| 8361229 | Seal configuration for a system for continuous deposition of a thin film layer on a substrate | Max William Reed, Scott Daniel Feldman-Peabody, Mark Jeffrey Pavol | 2013-01-29 |
| 8349144 | Methods of sputtering using a non-bonded semiconducting target | Robert Dwayne Gossman, Patrick Lynch O'Keefe, Scott Daniel Feldman-Peabody | 2013-01-08 |
| 8247255 | Modular system and process for continuous deposition of a thin film layer on a substrate | Mark Jeffrey Pavol, Brian Murphy, Christopher Rathweg, Edwin Jackson Little, Max William Reed | 2012-08-21 |
| 8236601 | Apparatus and methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device | Scott Daniel Feldman-Peabody | 2012-08-07 |
| 8189198 | Active viewport detection assembly for substrate detection in a vapor detection system | Mark Jeffrey Pavol | 2012-05-29 |
| 6881305 | Heated and cooled vacuum chamber shield | Norman L. Turner, Ernest Demaray | 2005-04-19 |
| 6432203 | Heated and cooled vacuum chamber shield | Norman L. Turner, Ernest Demaray | 2002-08-13 |
| 5855744 | Non-planar magnet tracking during magnetron sputtering | Harlan I. Halsey, Richard E. Demaray, Akihiro Hosokawa, Allan De Salvo, Victoria L. Hall | 1999-01-05 |