Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148766 | High-K dielectric materials comprising zirconium oxide utilized in display devices | Xiangxin Rui, Jrjyan Jerry CHEN, Soo Young Choi, Yujia Zhai | 2024-11-19 |
| 12136538 | Deposition chamber system diffuser with increased power efficiency | Changling Li, Gaku Furuta, Soo Young Choi, Robin L. Tiner, David Atchley +1 more | 2024-11-05 |
| 12076763 | Selective in-situ cleaning of high-k films from processing chamber using reactive gas precursor | Yujia Zhai, Xiangxin Rui, Dong-Kil Yim, Tae Kyung Won, Soo Young Choi | 2024-09-03 |
| 12080725 | Hybrid high-K dielectric material film stacks comprising zirconium oxide utilized in display devices | Xiangxin Rui, Jrjyan Jerry CHEN, Soo Young Choi, Yujia Zhai | 2024-09-03 |
| 12021152 | Process to reduce plasma induced damage | Jianheng Li, Yujia Zhai, Soo Young Choi | 2024-06-25 |
| 11894396 | High-K dielectric materials comprising zirconium oxide utilized in display devices | Xiangxin Rui, Jrjyan Jerry CHEN, Soo Young Choi, Yujia Zhai | 2024-02-06 |
| 11895872 | Thin film transistor with small storage capacitor with metal oxide switch | Jung Bae Kim, Dong-Kil Yim, Soo Young Choi | 2024-02-06 |
| 11773489 | Gas confiner assembly for eliminating shadow frame | Qunhua Wang, Robin L. Tiner, Soo Young Choi, Beom Soo Park | 2023-10-03 |
| 11742362 | Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices | Xiangxin Rui, Jrjyan Jerry CHEN, Soo Young Choi, Yujia Zhai | 2023-08-29 |
| 11670722 | Process to reduce plasma induced damage | Jianheng Li, Yujia Zhai, Soo Young Choi | 2023-06-06 |
| 11600642 | Layer stack for display applications | Xiangxin Rui, Soo Young Choi, Shinichi Kurita, Yujia Zhai | 2023-03-07 |
| 11380801 | Process to reduce plasma induced damage | Jianheng Li, Yujia Zhai, Soo Young Choi | 2022-07-05 |
| 11239258 | High-k dielectric materials comprising zirconium oxide utilized in display devices | Xiangxin Rui, Jrjyan Jerry CHEN, Soo Young Choi, Yujia Zhai | 2022-02-01 |
| 11145683 | Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices | Xiangxin Rui, Jrjyan Jerry CHEN, Soo Young Choi, Yujia Zhai | 2021-10-12 |
| 11123837 | Method of removal of sharp corners from diffuser plate | Ilyoung Richard Hong, Jianhua Zhou, Robin L. Tiner, Gaku Furuta, Shinichi Kurita +1 more | 2021-09-21 |
| 11101338 | Thin film transistor with small storage capacitor with metal oxide switch | Jung Bae Kim, Dong-Kil Yim, Soo Young Choi | 2021-08-24 |
| 11049887 | Layer stack for display applications | Xiangxin Rui, Soo Young Choi, Shinichi Kurita, Yujia Zhai | 2021-06-29 |
| 10927461 | Gas diffuser support structure for reduced particle generation | Allen Lau, Robin L. Tiner, Soo Young Choi | 2021-02-23 |
| 10923327 | Chamber liner | Jianheng Li, Robin L. Tiner, Allen Lau, Gaku Furuta, Soo Young Choi | 2021-02-16 |
| 10883174 | Gas diffuser mounting plate for reduced particle generation | Allen Lau, Hsiang AN, Jianhua Zhou, Robin L. Tiner | 2021-01-05 |
| 10804408 | Process to reduce plasma induced damage | Jianheng Li, Yujia Zhai, Soo Young Choi | 2020-10-13 |
| 10748759 | Methods for improved silicon nitride passivation films | Jianheng Li, Soo Young Choi | 2020-08-18 |
| 10697063 | Corner spoiler for improving profile uniformity | Gaku Furuta, Qunhua Wang, Robin L. Tiner, Beom Soo Park, Soo Young Choi +1 more | 2020-06-30 |
| 9818606 | Amorphous silicon thickness uniformity improved by process diluted with hydrogen and argon gas mixture | Qunhua Wang, Soo Young Choi | 2017-11-14 |
| 9299558 | Run-to-run stability of film deposition | Gaku Furuta, Qunhua Wang, Soo Young Choi | 2016-03-29 |