| 11892777 |
Systems and methods for contact immersion lithography |
Yeh-Jiun Tung, James Dunphy, Cesar Gensoli |
2024-02-06 |
$88,011,000 |
| 11500295 |
Systems and methods for contact immersion lithography |
Yeh-Jiun Tung, James Dunphy, Cesar Gensoli |
2022-11-15 |
$93,392,000 |
| 11275312 |
Systems and methods for verifying photomask cleanliness |
James Dunphy, David Hutchison, Yeh-Jiun Tung, Eric Copenhaver, Nao S. Chuei |
2022-03-15 |
$89,103,000 |
| 10948830 |
Systems and methods for lithography |
Yeh-Jiun Tung, James Dunphy, Cesar Gensoli |
2021-03-16 |
$65,644,000 |
| 10338390 |
Method for fabricating a curved eyepiece |
Ozan Cakmakci, Oscar A. Martinez, James C. Dunphy, John Fitch, Omar Negrete +1 more |
2019-07-02 |
$29,234,000 |
| 9789675 |
Method, apparatus and system for providing a uniform laminate structure |
— |
2017-10-17 |
$15,747,000 |
| 9568734 |
Lens with lightguide insert for head wearable display |
Sandeep Giri, James C. Dunphy, Mark B. Spitzer |
2017-02-14 |
$11,566,000 |
| 9399596 |
Methods and systems for bonding multiple wafers |
Sandeep Giri, Amir Torkaman, Jamie Nam |
2016-07-26 |
$23,166,000 |
| 9213178 |
Lens with lightguide insert for head wearable display |
Sandeep Giri, James C. Dunphy, Mark B. Spitzer |
2015-12-15 |
$23,405,000 |
| 8395837 |
Releasing and post-releasing processes in fabrications for micromirror array devices |
Gregory P. Schaadt, James C. Dunphy, Dmitri Simonian, John D. Porter |
2013-03-12 |
$14,420,000 |
| 8068267 |
Speckle reduction in display systems that employ coherent light sources |
Regis Grasser, Terry Alan Bartlett |
2011-11-29 |
$13,963,000 |
| 7645704 |
Methods and apparatus of etch process control in fabrications of microstructures |
Gregory P. Schaadt |
2010-01-12 |
$24,865,000 |
| 7483198 |
Micromirror device and method for making the same |
Jonathan Doan, Andrew Huibers, Satyadev Patel, James C. Dunphy, Dmitri Simonian +1 more |
2009-01-27 |
$11,557,000 |
| 7362494 |
Micromirror devices and methods of making the same |
Andrew Huibers, James C. Dunphy, Satyadev Patel |
2008-04-22 |
$7,957,000 |
| 7307775 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
Satayadev Patel, Andrew Huibers, Steve S. Chiang, Robert M. Duboc, Jr., Thomas J. Grobelny +4 more |
2007-12-11 |
$32,534,000 |
| 7215459 |
Micromirror devices with in-plane deformable hinge |
Andrew Huibers, Satyadev Patel, Jonathan Doan, James C. Dunphy, Dmitri Simonian +1 more |
2007-05-08 |
|
| 7189332 |
Apparatus and method for detecting an endpoint in a vapor phase etch |
Satyadev Patel, Gregory P. Schaadt, Douglas B. MacDonald, Niles K. MacDonald |
2007-03-13 |
$13,003,000 |
| 7119944 |
Micromirror device and method for making the same |
Satyadev Patel, Andrew Huibers, Jonathan Doan, James C. Dunphy, Dmitri Simonian +1 more |
2006-10-10 |
|
| 7041224 |
Method for vapor phase etching of silicon |
Satyadev Patel, Gregory P. Schaadt, Douglas B. MacDonald, Andrew Huibers, Peter Heureux |
2006-05-09 |
|
| 7027200 |
Etching method used in fabrications of microstructures |
Gregory P. Schaadt, Andrew Huibers, Satyadev Patel |
2006-04-11 |
|
| 6942811 |
Method for achieving improved selectivity in an etching process |
Satyadev Patel, Gregory P. Schaadt, Douglas B. MacDonald |
2005-09-13 |
|
| 6939472 |
Etching method in fabrications of microstructures |
Gregory P. Schaadt |
2005-09-06 |
|
| 6801285 |
Thin cell gap microdisplays with optimum optical properties |
Mary Lou Jepsen |
2004-10-05 |
|
| 5514296 |
Glassy low molar mass chiral nematic liquid crystalline compositions and optical articles formed therefrom |
Shaw H. Chen |
1996-05-07 |
|
| 5378393 |
Glassy chiral nematic liquid crystalline compositions of low molar mass and optical devices formed from same |
Shaw H. Chen |
1995-01-03 |
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