Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11892777 | Systems and methods for contact immersion lithography | Hongqin Shi, Yeh-Jiun Tung, James Dunphy | 2024-02-06 |
| 11500295 | Systems and methods for contact immersion lithography | Hongqin Shi, Yeh-Jiun Tung, James Dunphy | 2022-11-15 |
| 10948830 | Systems and methods for lithography | Hongqin Shi, Yeh-Jiun Tung, James Dunphy | 2021-03-16 |