Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8668960 | Flow coating apparatus and method of coating | Ramasubrahmaniam Hanumanthu, Patrick J. Neyman, Brenor L. Brophy, Kevin Kopczynski, Vinod Nair | 2014-03-11 |
| 8052885 | Structural modification using electron beam activated chemical etch | Mehran Naser-Ghodsi, Garrett Pickard, Rudy F. Garcia, Ming Lun Yu, Kenneth Krzeczowski +3 more | 2011-11-08 |
| 7879730 | Etch selectivity enhancement in electron beam activated chemical etch | Mehran Naser-Ghodsi, Garrett Pickard, Rudy F. Garcia, Tzu-Chin Chuang, Ming Lun Yu +4 more | 2011-02-01 |
| 7838833 | Apparatus and method for e-beam dark imaging with perspective control | Matthew Lent, Stanislaw Marek Borowicz, Mehran Nasser-Ghodsi, Ye Yang, Kenneth Krzeczowski | 2010-11-23 |
| 7755042 | Auger electron spectrometer with applied magnetic field at target surface | Gabor Toth, Rudy F. Garcia, Chris Huang, Mehran Nasser-Ghodsi, Garrett Pickard +3 more | 2010-07-13 |
| 7612348 | Transverse magnetic field voltage isolator | Alexander Jozef Gubbens, Mehran Nasser-Ghodsi, Rudy F. Garcia, Doug K. Masnaghetti | 2009-11-03 |
| 7394339 | Transverse magnetic field voltage isolator | Alexander Jozef Gubbens, Mehran Nasser-Ghodsi, Rudy F. Garcia, Doug K. Masnaghetti | 2008-07-01 |
| 7189332 | Apparatus and method for detecting an endpoint in a vapor phase etch | Satyadev Patel, Gregory P. Schaadt, Douglas B. MacDonald, Hongqin Shi | 2007-03-13 |
| 6949202 | Apparatus and method for flow of process gas in an ultra-clean environment | Satyadev Patel, Gregory P. Schaadt, Douglas B. MacDonald | 2005-09-27 |
| 6175095 | Resonant impedance-matching slow-wave ring structure microwave applicator for plasmas | Terry L. White, James W. Caughran | 2001-01-16 |