Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7017514 | Method and apparatus for plasma optimization in water processing | Robert Shepherd | 2006-03-28 |
| 6211621 | Energy transfer microwave plasma source | Terry L. White, Daniel G. Nagal, Sidney Hung Luu | 2001-04-03 |
| 6175095 | Resonant impedance-matching slow-wave ring structure microwave applicator for plasmas | Niles K. MacDonald, Terry L. White | 2001-01-16 |
| 5863170 | Modular process system | Charles A. Boitnott, Steve Egbert | 1999-01-26 |
| 5855465 | Semiconductor wafer processing carousel | Charles A. Boitnott, Steve Egbert | 1999-01-05 |
| 5667592 | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster | Charles A. Boitnott, Steve Egbert | 1997-09-16 |
| 5662143 | Modular gas box system | — | 1997-09-02 |