Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5914278 | Backside etch process chamber and method | Robert Shepherd | 1999-06-22 |
| 5863170 | Modular process system | James W. Caughran, Steve Egbert | 1999-01-26 |
| 5855465 | Semiconductor wafer processing carousel | James W. Caughran, Steve Egbert | 1999-01-05 |
| 5814154 | Short-coupled-path extender for plasma source | — | 1998-09-29 |
| 5667592 | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster | James W. Caughran, Steve Egbert | 1997-09-16 |
| 5314846 | Method for processing a semiconductor wafer | — | 1994-05-24 |
| 5167716 | Method and apparatus for batch processing a semiconductor wafer | Monte M. Toole | 1992-12-01 |
| 5167717 | Apparatus and method for processing a semiconductor wafer | — | 1992-12-01 |