Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5863170 | Modular process system | Charles A. Boitnott, James W. Caughran | 1999-01-26 |
| 5855465 | Semiconductor wafer processing carousel | Charles A. Boitnott, James W. Caughran | 1999-01-05 |
| 5667592 | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster | Charles A. Boitnott, James W. Caughran | 1997-09-16 |